MicroScience Engineering Laboratories

SRI's MicroScience Engineering Laboratories (MSEL) explore the fields of microelectromechanical systems (MEMS) and materials science to develop innovative micro- and nanometer-scale structures, sensors, and systems to solve important, real-world problems.

The multidisciplinary MSEL team can provide technology development assistance; R&D in MEMS design, fabrication, and characterization; and in-depth analysis. We have state-of-the-art facilities in California and Florida and a dedicated staff of researchers, engineers, and technicians to provide the expertise required to study, create, and evaluate new science and technology.

The MSEL team offers a wealth of practical design, fabrication, and characterization experience. Click on the links below to find out more information about our work.

• Microsensors: Chemical, Physical
• Optical MEMS
• Advanced Materials for MEMS
• Vacuum Microelectronics